Piezoelectric Energy Harvester Employing Simple Process with Flammable Material

초록

In this study, a simplified fabrication process for MEMS-based piezoelectric energy harvesters was proposed. In this process, a specially designed mold was prepared using flammable material, Poly dimethyl siloxane. The proposed fabrication process is simplified MEMS process in which photo-lithography and chemical etching were omitted. Piezoelectric energy harvesters based on the suggested simple process with flammable materials were successfully fabricated with multi-layer stacked structure. The shape of ceramic pillar was employed cylinder structure. The aim of this process is simplification of fabrication without lithography process. Lead magnesium niobate lead zirconate titanate, 0.2Pb(Mg1/3Nb2/3)O-3-0.8Pb(Zr0.52Ti0.48)O-3 composition was used as piezoelectric material due to their excellent piezoelectric properties. The piezoelectric energy properties have been investigated by different types of electrical energy measuring system. The fabricated devices have been optimized by impedance matching and bridge rectifier circuit. The maximum value of generated output energy is 2.080 mW/cm(2) for triple-layer of PMN-PZT pillar structure with PDMS.

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