Reliability of bottom-gate graphene field-effect transistors prepared by using inductively coupled plasma-chemical vapor deposition

  • Lee, J.-K.; 
  • Chung, H.-J.; 
  • Heo, J.; 
  • Seo, S.; 
  • Cho, I.H.; 
  • ... Kwon, Hyuck-In; 
  • 외 1명
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초록

Stability degradation in bottom-gate graphene field-effect transistors prepared by using inductively coupled plasma-chemical vapor deposition method are investigated under bias, temperature and illumination stress. The stretched-exponential time dependence model, which can be derived based on the trapping/detrapping of charges to/from existing traps and continuous redistribution of charges in bulk dielectrics, is well applied in fitting the time dependence of the transfer curve shifts in all stress conditions. The stress wavelength is considered as important factors as well as the bias and temperature stress in the transfer characteristic instabilities of graphene FEFs. © 2011 American Institute of Physics.

키워드

Bulk dielectric; Inductively-coupled; Stress condition; Temperature stress; Time dependence; Transfer characteristics; Transfer curves; Trapping/detrapping; Vapor deposition method; Chemical stability; Chemical vapor deposition; Curve fitting; Graphene; Inductively coupled plasma; Plasma deposition; Plasma stability; Transistors; Field effect transistors
제목
Reliability of bottom-gate graphene field-effect transistors prepared by using inductively coupled plasma-chemical vapor deposition
저자
Lee, J.-K.; Chung, H.-J.; Heo, J.; Seo, S.; Cho, I.H.; Kwon, Hyuck-In; Lee, J.-H.
DOI
10.1063/1.3589120
발행일
2011-05
유형
Article
저널명
Applied Physics Letters
권
98
호
19