MEMS Gyroscope를 위한 feed-through 노이즈 제거 기법

초록

Since the dimensions of MEMS gyroscope are very small compared to those of conventional gyroscope, MEMS gyroscope should be able to measure charge of pico-coulomb caused by very small change of electrodes gap. However, feed-through signal from driving electrodes to the sensing electrodes due to the electromagnetic coupling is much greater than the sensing signal, which degrades the sensitivity of MEMS gyroscope. This paper introduces the feed-through noise canceling technique using dummy port and confirms the feasibility of feed-through noise canceling experimentally. Experimental results shows that, when driving signal is 6 Vpp, 30 ㎑, feed-through signal of vacuum packaged Si Gyroscope decreases from -53.2 ㏈m to -77.1 ㏈m by using feed-through reduction technique. Q-factor that could not be measured without noise reduction is measured to be about 2500 and resonance frequency to be 7.018 ㎑.

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