Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

초록

CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

키워드