A Method to Fabricate Low-Cost and Large Area Vitreous Carbon Mold for Glass Molded Microstructures

초록

A method to fabricate a vitreous carbon (VC) mold for glass molded microstructures was investigated by replicating a microstructured furan precursor and carbonization process. The composition of a furan-based thermal curable polymer was optimized along with the processing parameters of thermal curing and carbonization processes to improve the surface quality of microcavities on the VC mold. The engineering feasibility of the proposed method was ensured by successfully molding glass micro-grating structures with a pitch of similar to 46.3 mu m and a height of similar to 3.8 mu m using the fabricated VC molds.

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