Improved Electrical and Temporal Stability of In-Zn Oxide Semiconductor Thin-Film Transistors With Organic Passivation Layer

  • Heo, Kwan-Jun
  • Tarsoly, Gergely
  • Lee, Jae-Yun
  • Choi, Seong Gon
  • Koh, Jung-Hyuk
  • 외 1명
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초록

Solution-processed In-Zn oxide (IZO) semiconductor thin-film transistors (TFTs) were fabricated with passivation layers of either poly(methyl methacrylate) (PMMA) or cyclic transparent optical polymer (CYTOP). According to the transfer curves obtained on the day of fabrication and after 200 days, the drain-source current of the IZO TFT without a passivation layer decreased by approximately 37 %. For the PMMA-passivated IZO TFT, it decreased by approximately 31 %. The current for the CYTOPpassivated IZO TFT showed significantly lower, only 7 % deterioration. Hence, the CYTOP-passivated IZO TFT exhibited improved electrical stability under long term ambient storage. This was attributed to the difference in the chemical composition of the two polymers, as CYTOP is a fluoropolymer, while PMMA is an ester group containing organic polymer. We show, passivation of the active layer with the proper organic film improves the stability of the high-performance solution-processed IZO TFTs.

키워드

Performance evaluationSemiconductor device measurementStatistical distributionsElectric variablesStability analysisThin film transistorsPlasticsIZOoxides semiconductorpassivationthin-film transistorDEFECTSPMMA
제목
Improved Electrical and Temporal Stability of In-Zn Oxide Semiconductor Thin-Film Transistors With Organic Passivation Layer
저자
Heo, Kwan-JunTarsoly, GergelyLee, Jae-YunChoi, Seong GonKoh, Jung-HyukKim, Sung-Jin
DOI
10.1109/JEDS.2022.3194921
발행일
2022
유형
Article
저널명
IEEE Journal of the Electron Devices Society
10
페이지
660 ~ 665