Concurrent events of memory and threshold switching in Ag/SiNx/Si devices

  • Kim, Sungjun; 
  • Kim, Min-Hwi; 
  • Kim, Tae-Hyeon; 
  • Chen, Ying-Chen; 
  • Chang, Yao-Feng; 
  • 외 4명
Citations

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초록

In this work, the simultaneous detection of threshold switching and bipolar memory switching in Ag/SiNx/p(++)-Si devices is investigated. In the DC sweep mode, threshold switching is observed with low compliance current limit (CCL) of 1 mu A while memory switching is dominant when high CCL (1 mA) is applied. It is found that in the pulse switching mode, pulse amplitude is an important factor in determining the nature of switching. It has been proven that the strength of the Ag filament formed in the SiN x determines the nonvolatile property of the switching. The undirectional threshold switching behavior in low currents of Ag/SiNx/p(++)-Si devices could be used as a selector for a low-power unipolar memory. Moreover, operating in two modes in one device will provide more flexibility in device design. Published by the AVS.

키워드

RANDOM-ACCESS MEMORY; BEHAVIOR; OXIDE
제목
Concurrent events of memory and threshold switching in Ag/SiNx/Si devices
저자
Kim, Sungjun; Kim, Min-Hwi; Kim, Tae-Hyeon; Chen, Ying-Chen; Chang, Yao-Feng; Ismail, Muhammad; Kim, Yoon; Ryoo, Kyung-Chang; Park, Byung-Gook
DOI
10.1116/1.5034058
발행일
2018-09
유형
Article
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
권
36
호
5