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Integrated surface plasmon resonance resonator using silicon on insulator
- Oh, Geum-Yoon;
- Kim, Doo-Gun;
- Kim, Seon Hoon;
- Ki, Hyun Chul;
- Kim, Tae Un;
- ... Choi, Young-Wan;
- 외 3명
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0초록
We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65 degrees with Au thickness of 35 nm for the change of the refractive index Delta n = 1x10(-3).
키워드
Biosensor; Ring resonator; Silicon on insulator (SOI); Surface plasmon resonance (SPR); SENSOR; REFLECTION; LIGHT
- 제목
- Integrated surface plasmon resonance resonator using silicon on insulator
- 저자
- Oh, Geum-Yoon; Kim, Doo-Gun; Kim, Seon Hoon; Ki, Hyun Chul; Kim, Tae Un; Kim, Hong-Seung; Lee, Tae-Kyeong; Lee, Byeong-Hyeon; Choi, Young-Wan
- 발행일
- 2013-03
- 유형
- Proceedings Paper
- 저널명
- INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XVII
- 권
- 8627
- 언어
- ENG
- 출판사
- SPIE-INT SOC OPTICAL ENGINEERING
- 발행국가
- 미국
- ISSN
- P 0277-786X