Resonance characteristics of localized plasmonic structures with periodic ZnO nano-patterns

초록

Localized plasmonic structures with the periodic ZnO nano-patterns are demonstrated to increase the sensing characteristics of plasmonic sensor. The ZnO nano-patterns with 30 and 50nm thicknesses are formed on the Au thin film of 50nm, which have the periodic nano-patterns of 300nm. Localized plasmonic structures are optimized using the three-dimensional finite-difference time-domain method as a function of incident angle for the width and thickness of the ZnO nano-structures. Localized plasmonic structures with the periodic ZnO nano-holes are fabricated using the double exposure technique by laser interference lithography. The measured resonance angles of 47.5 degrees and 54 degrees are obtained in the localized plasmonic structures with the periodic ZnO nano-patterns of 30 and 50nm thicknesses, respectively.

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