Room temperature-grown highly oriented p-type nanocrystalline tellurium thin-films transistors for large-scale CMOS circuits

초록

Although facile fabrication of high-performance thin-film transistor (TFT)-based complementary metal oxide–semiconductor (CMOS) circuits over a large area has generated significant interest, the lack of reliable and uniform p-type TFTs is hindering it. In this study, we prepared high-performance CMOS circuits using room temperature deposited nanocrystalline tellurium (nc-Te) and sputtered amorphous-indium gallium zinc oxide (a-IGZO) TFTs. The facile polyethyleneimine (PEI) surface treatment enabled Te atom anchoring and crystal orientation control along with continuous surface coverage, resulting in a high-performance TFT with an average mobility of 21.1 cm2V−1s−1 and an Ion/Ioff ratio of 104. By introducing monolithic integration of nc-Te and a-IGZO TFTs, various CMOS circuits including inverter, NAND, and NOR circuits were fabricated and operated quite logically. Moreover, seven-stage ring oscillators comprising 14 cross-wired TFTs validated the cascading of multiple stages and device uniformity of the complementary system, achieving an oscillation frequency up to 392.16 kHz at VDD of 20 V. nc-Te on a PEI-treated surface offers a general route to producing high-performance and stable p-type semiconductors while ensuring compatibility with standard CMOS processing and large-scale on-chip device applications. © 2023 Elsevier B.V.

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