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Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing
- Kang, T. J.;
- Kim, J. G.;
- Kim, J. H.;
- Hwang, K. C.;
- Lee, B. W.;
- ... Baek, C. W.;
- 외 4명
WEB OF SCIENCE
16SCOPUS
16초록
The present study quantitatively examines the deformation characteristics of electroplated MEMS structures released by plasma ashing. This study investigates the thermal deformations clue to the high temperature of ambient plasma, the changes in microstructures of the material during the deposition process, and the changes in material properties due to physical and chemical reactions between the film surface and the plasma particles. We conduct various experimental tests and introduce an analytical model to evaluate the residual stresses in MEMS structures when considering the three-dimensional anchor effect. The experimental results show that the high temperature of ambient plasma, the inhomogeneity of microstructures in the thickness direction, and the changes in the surface material propel-ties may cause the deflections of MEMS structures after plasma ashing. (c) 2008 Elsevier B.V. All rights reserved.
키워드
- 제목
- Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing
- 저자
- Kang, T. J.; Kim, J. G.; Kim, J. H.; Hwang, K. C.; Lee, B. W.; Baek, C. W.; Kim, Y. K.; Kwon, D.; Lee, H. Y.; Kim, Y. H.
- 발행일
- 2008-12
- 유형
- Article
- 권
- 148
- 호
- 2
- 페이지
- 407 ~ 415
- 언어
- ENG
- 출판사
- ELSEVIER SCIENCE SA
- 발행국가
- 스위스
- 분량
- 9 페이지
- ISSN
- P 0924-4247