Symmetric AFM cantilever for mechanical characterization of Mo thin film

초록

We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 mu m in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.

키워드