Micro resonator sensor

초록

Disclosed is a micro resonator sensor. A main waveguide is provided with an incident hole for receiving an optical signal and an exit hole for outputting an optical signal, and has an optical coupling region where a part of the optical signal inputted through the incident hole is split. A resonance waveguide has an optical coupling region optically connected to the optical coupling region of the main waveguide to receive the split optical signal split from the main waveguide and is configured of a plurality of optical waveguides arranged in a polygonal shape. In addition, openings are formed at one or more optical waveguides among optical waveguides configuring the resonance waveguide. Optical path changing means are installed at apex regions contacting with adjacent optical waveguides forming the resonance waveguide and reflect at least a part of the split optical signal inputted into the resonance waveguide to circulate the split optical signal inside the resonance waveguide. According to the present invention, a resonator is configured using a total reflection mirror, and thus the micro resonator sensor can be manufactured without an excessive radiation loss. Furthermore, all elements can be integrated on the same wafer, and thus the micro resonator sensor can be manufactured as an on-chip. Therefore, it is advantageous in that a super-micro optical sensor module applicable to a handheld terminal can be manufactured.