Fabrication of Vitreous Carbon Mold for Glass Moled Microarray

  • Asgar, M.A.; 
  • Kim, Y.K.; 
  • Jin, C.; 
  • Kim, J.; 
  • Byeon, S.; 
  • ... Kim, S.-M.; 
  • 외 2명
Citations

SCOPUS

1

초록

Glass micro-lens array (MLA) are attractive optical elements for light manipulation. Glass molding has been utilized for fabricating the MLA pattern for mass-scale production with high accuracy. Herein, a method to fabricate vitreous carbon (VC) mold with MLA pattern has been demonstrated for glass molding. The VC mold with MLA pattern was obtained by carbonization of furan precursor which was replicated from a PDMS mold. The intermediate PDMS mold was casted from a metal master mold using soft lithography method. © 2022 IEEE.

키워드

carbonization; micro-lens array; VC mold
제목
Fabrication of Vitreous Carbon Mold for Glass Moled Microarray
저자
Asgar, M.A.; Kim, Y.K.; Jin, C.; Kim, J.; Byeon, S.; Ali, M.; Hussain, T.; Kim, S.-M.
DOI
10.1109/ICTC55196.2022.9952495
발행일
2022
유형
Conference Paper
저널명
International Conference on ICT Convergence
권
2022-October
페이지
1151 ~ 1153