CO2 laser annealing effects for Al-doped ZnO multilayered films

초록

In this research, comparative optical annealing effects on Al-doped ZnO multilayer thin films were analyzed. Both a CO2 laser and the rapid thermal annealing (RTA) process were carried out and compared to test their annealing effects. The uniformly distributed long wavelength of a CO2 laser can penetrate into deeper areas from the surface of a thin film compared to that of a short wavelength of lasers such as UV and IR lasers. 4 different types of Al-doped ZnO thin films showed different stress/strain behaviors. In this research, different compositions of Al-doped ZnO thin films were prepared and annealed through both an optical annealing method using a laser and the RTA process. © 2018 Elsevier Ltd and Techna Group S.r.l.

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