Micro-resonator sensor using evanescent wave of total reflection mirror

초록

A micro-resonator sensor uses an evanescent wave of a total reflection mirror. The sensor includes an input waveguide for guiding inspection light incidented on one end section to the other section. A total reflection mirror is disposed at the other section of the input waveguide such that an incident angle made with the input waveguide is larger than a total reflection threshold angle at which the inspection light is totally reflected, and includes a receptor provided on the other side from the side on which the inspection light is incidented and combined with a measurement-subject material. An output waveguide is disposed at a certain output angle relative to the total reflection mirror for outputting a reflection light whose intensity changes according to the measurement-subject material due to an interaction between the evanescent wave generated by the inspection light incidented to the total reflection mirror and the measurement-subject material.