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Ink-Jet-Printed Zinc-Tin-Oxide Thin-Film Transistors and Circuits With Rapid Thermal Annealing Process
- Kim, Yong-Hoon;
- Kim, Kwang-Ho;
- Oh, Min Suk;
- Kim, Hyun Jae;
- Han, Jeong In;
- ... Park, Sung Kyu;
- 외 1명
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53초록
We report on high-performance ink-jet-printed amorphous zinc-tin-oxide (alpha-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed alpha-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed a-ZTO TFTs (W/L = 100 mu m/10 mu m) have shown a carrier mobility of 4.98 cm(2)/V . s with an on/off current ratio that is greater than 10(9) and a subthreshold slope of 0.92 V/dec. The alpha-ZTO TFT-based inverter operation was good with acceptable logic level conservation.
키워드
Ink-jet printing; rapid thermal annealing; thin-film transistor; zinc-tin-oxide
- 제목
- Ink-Jet-Printed Zinc-Tin-Oxide Thin-Film Transistors and Circuits With Rapid Thermal Annealing Process
- 저자
- Kim, Yong-Hoon; Kim, Kwang-Ho; Oh, Min Suk; Kim, Hyun Jae; Han, Jeong In; Han, Min-Koo; Park, Sung Kyu
- 발행일
- 2010-08
- 유형
- Article
- 권
- 31
- 호
- 8
- 페이지
- 836 ~ 838
- 언어
- ENG
- 출판사
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- 발행국가
- 미국
- 분량
- 3 페이지
- ISSN
- E 1558-0563
P 0741-3106