Spin-Coated In-Doped ZnO Nanorods for Transparent Conducting Oxide Applications

초록

In this paper, we have prepared different compositions and thicknesses of In-doped ZnO thin films using the spin-coating process. To determine the optimum electrical conductance and transmittance, 0-2.5 mol% In contents were doped onto ZnO thin films to realize transparent conducting-oxide applications. 1.5 mol% In-doped ZnO thin films showed the highest electrical conductance from among the other specimens considered, and displayed good optical transmittance properties. From these results, different thicknesses of 1.5 mol% In-doped ZnO thin films were analyzed for application to transparent conducting oxides. As the thickness of 1.5 mol% In-doped ZnO thin films increased, the optical transmittance was degraded, while the sheet resistance improved, and vice versa. In addition, as increasing the thickness of In-doped ZnO thin films, nanorods were developed. By developing these nanorods, the electrical conductivities improved significantly.

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