Design and fabrication of cost-effective side-stem micromechanical disk resonator with large capacitive gap

초록

A high-performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost-effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 mu m. The designed disk resonator operates in an elliptic contour-mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.