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Performance of RF MEMS switches at low temperatures
- Su, H.T.;
- Llamas-Garro, I.;
- Lancaster, M.J.;
- Prest, M.;
- Park, J.-H.;
- ... Baek, C.-W.;
- 외 2명
Citations
SCOPUS
16초록
The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290K. The investigation shows a 50 increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature. © The Institution of Engineering and Technology 2006.
키워드
Actuation voltage; Low temperatures; Metal switches; Actuators; Low temperature effects; Mathematical models; Voltage control; Microelectromechanical devices
- 제목
- Performance of RF MEMS switches at low temperatures
- 저자
- Su, H.T.; Llamas-Garro, I.; Lancaster, M.J.; Prest, M.; Park, J.-H.; Kim, J.-M.; Baek, C.-W.; Kim, Y.-K.
- 발행일
- 2006
- 유형
- Article
- 권
- 42
- 호
- 21
- 페이지
- 1219 ~ 1221
- 언어
- ENG
- 발행국가
- 영국
- 분량
- 3 페이지
- ISSN
- E 1350-911X
P 0013-5194