Angle Dependent 3-D Directional Patterning of Flexible Films by Infrared Laser

초록

Laser direct patterning (LDP) technology has attracted great attention due to its process simplification and environmental friendliness. It is replacing the existing photo-lithography technology. Infrared (IR) laser equipment also has advantages such as low cost and long duration, although it is difficult to implement fine line width compared to ultraviolet (UV) or excimer laser. Therefore, it is very important to realize 3-D patterning system based on cheap infrared laser system. In this paper, 3-D infrared laser direct patterning system was designed by introducing an etching process on Ag paste/ITO/PET flexible film. Such 3-D patterned Ag paste/ITO/PET flexible films showed feasibility and effectiveness of 3-D laser directional patterning technologies. Etch ratio of the fabricated Ag paste/ITO/PET flexible film after 3-D infrared laser direct patterning was then systematically investigated.

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