Communication-Monitoring the Average Molecular Weight of Polyethylene Glycol in an Acidic Cu Plating Bath

  • Choe, Seunghoe; 
  • Kim, Myung Jun; 
  • Lim, Taeho; 
  • Ham, Yu Seok; 
  • Kim, Soo-Kil; 
  • 외 1명
Citations

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5
Citations

SCOPUS

5

초록

We devise a novel electrochemical method that enables the analysis of the average molecular weight (MW) of polyethylene glycol (PEG) in an acidic Cu plating bath. During the cyclic voltammetry analysis of the Cu plating bath, a hysteretic voltammogram is generated, and it is related to the MW of PEG. This relationship is used for the analysis of the average MW of PEG in the acidic Cu plating solution, with the error of analysis being less than 9%. (C) 2016 The Electrochemical Society. All rights reserved.

키워드

COPPER ELECTRODEPOSITION; PERFORMANCE; SUPPRESSORS; ADDITIVES
제목
Communication-Monitoring the Average Molecular Weight of Polyethylene Glycol in an Acidic Cu Plating Bath
저자
Choe, Seunghoe; Kim, Myung Jun; Lim, Taeho; Ham, Yu Seok; Kim, Soo-Kil; Kim, Jae Jeong
DOI
10.1149/2.0641614jes
발행일
2016
유형
Article
저널명
Journal of the Electrochemical Society
권
163
호
14
페이지
D747 ~ D749