Glassy carbon roll-type mold manufacturing method for fine pattern formation, and glassy carbon roll-type mold manufactured by the method

초록

Provided is a glassy carbon roll-type mold manufacturing method for fine pattern formation. The method is for manufacturing a glassy carbon roll-type mold configured to form a fine pattern having a micro-nano structure on a substrate including glass or a metal. The method includes: preparing a roll precursor including a thermosetting resin material, the roll precursor having a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed, the roll precursor being configured to press the substrate while rotating on the substrate; and carbonizing the roll precursor.

제목
Glassy carbon roll-type mold manufacturing method for fine pattern formation, and glassy carbon roll-type mold manufactured by the method
저자
Seok Min Kim; Jun Kim; Muhammad Refatul Haq; Young Kyu Kim
발행일
2020-05-19
출원번호
15/887564
등록번호
10654083
출원일
2018-02-02
등록일
2020-05-19