Metal-Oxide Thin-Film Transistors for Flexible Electronics

Kim, Y.-H.; Park, S.K.

doi:10.1002/9783527679973.ch2

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Metal-Oxide Thin-Film Transistors for Flexible Electronics

Kim, Y.-H.;
Park, S.K.

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초록

Flexible electronic devices have been extensively researched in industries and research institutions with an aim to create new conceptual electronics such as flexible and bendable devices. Metal-oxide (MO) semiconductors have attracted a great deal of interest because of their relatively high carrier mobility and better operational stability over amorphous silicon thin-film transistors (a-Si:H) and organic thin-film transistors (TFTs). The most intriguing advantages of using MO semiconductor TFTs in flat-panel displays is the large-area scalability by relatively simple fabrication processes compared to low-temperature polycrystalline silicon (LTPS) TFT technology. Vacuum deposition processes are now widely used in flat-panel display manufacturing, and sputtering technology is one of the most mature technologies among many other deposition techniques. Solution-processed MO TFT is becoming one of the essential technologies for future flexible electronics because of its high electrical performance with reasonable reliability. © 2015 Wiley-VCH Verlag GmbH & Co. KGaA. All rights reserved.

키워드

Amorphous silicon thin-film transistors (a-Si:H); Flexible electronics; Low-temperature polycrystalline silicon (LTPS); Metal-oxide (MO) semiconductors; Solution-processing; Sputtering technology; Thin-film transistors (TFTs); Vacuum deposition; Amorphous films; Amorphous materials; Amorphous silicon; Field effect transistors; Flat panel displays; Flexible electronics; Metallic compounds; Metals; Polycrystalline materials; Polysilicon; Semiconducting silicon; Temperature; Thin film circuits; Thin films; Vacuum deposition; a-Si:H; Low temperature polycrystalline silicon; Metal oxides; Solution-processing; Sputtering technology; Thin film transistors (TFTs); Thin film transistors

제목: Metal-Oxide Thin-Film Transistors for Flexible Electronics

저자: Kim, Y.-H.; Park, S.K.

DOI: 10.1002/9783527679973.ch2

발행일: 2015-01

유형: Book Chapter

저널명: Large Area and Flexible Electronics

페이지: 101 ~ 116

언어: ENG

출판사: wiley

분량: 16 페이지

ISSN: P 0000-0000