Reversible nonvolatile and threshold switching characteristics in Cu/high-k/Si devices

  • Mahata, Chandreswar; 
  • Kim, Wonwoo; 
  • Kim, Shiwhan; 
  • Ismail, Muhammad; 
  • Kim, Min-Hwi; 
  • 외 2명
Citations

WEB OF SCIENCE

2
Citations

SCOPUS

3

초록

Here, the resistive switching properties of Cu/Al2O3/p-Si and Cu/HfO2/p-Si devices are investigated in details. Both memory switching and threshold switching behaviors observed under different current compliance conditions. The transition between two switching modes is possible. Cu ion diffusion form conductive filaments inside the insulator and formation/dissociation mechanism induced the switching phenomenon. The device performances under both memory switching and threshold switching are possible for non-volatile storage memory and selector applications, respectively.

키워드

resistive switching; atomic layer deposition; CBRAM; copper; high-k dielectric; MEMORY
제목
Reversible nonvolatile and threshold switching characteristics in Cu/high-k/Si devices
저자
Mahata, Chandreswar; Kim, Wonwoo; Kim, Shiwhan; Ismail, Muhammad; Kim, Min-Hwi; Kim, Sungjun; Park, Byung-Gook
DOI
10.1587/elex.16.20190404
발행일
2019-08
유형
Article
저널명
IEICE Electronics Express
권
16
호
16