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Reversible nonvolatile and threshold switching characteristics in Cu/high-k/Si devices
- Mahata, Chandreswar;
- Kim, Wonwoo;
- Kim, Shiwhan;
- Ismail, Muhammad;
- Kim, Min-Hwi;
- 외 2명
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3초록
Here, the resistive switching properties of Cu/Al2O3/p-Si and Cu/HfO2/p-Si devices are investigated in details. Both memory switching and threshold switching behaviors observed under different current compliance conditions. The transition between two switching modes is possible. Cu ion diffusion form conductive filaments inside the insulator and formation/dissociation mechanism induced the switching phenomenon. The device performances under both memory switching and threshold switching are possible for non-volatile storage memory and selector applications, respectively.
키워드
resistive switching; atomic layer deposition; CBRAM; copper; high-k dielectric; MEMORY
- 제목
- Reversible nonvolatile and threshold switching characteristics in Cu/high-k/Si devices
- 저자
- Mahata, Chandreswar; Kim, Wonwoo; Kim, Shiwhan; Ismail, Muhammad; Kim, Min-Hwi; Kim, Sungjun; Park, Byung-Gook
- 발행일
- 2019-08
- 유형
- Article
- 권
- 16
- 호
- 16
- 언어
- ENG
- 출판사
- IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
- 발행국가
- 일본
- ISSN
- P 1349-2543