Design and Analysis of Gate-recessed AlGaN/GaN Fin-type Field-Effect Transistor

  • Jang, Young In; 
  • Seo, Jae Hwa; 
  • Yoon, Young Jun; 
  • Eun, Hye Rim; 
  • Kwon, Ra Hee; 
  • ... Kwon, Hyuck-In; 
  • 외 2명
Citations

WEB OF SCIENCE

3
Citations

SCOPUS

4

초록

This paper presents the design and analysis of gate-recessed AlGaN/GaN Fin-type Field-Effect Transistor (FinFET). The three-dimensional (3-D) technology computer-aided design (TCAD) simulations were performed to analyze the direct-current (DC) and radio-frequency (RF) characteristics for AlGaN/GaN FinFETs. The fin width (W-fin) and the height of GaN layer (H-GaN) are the design parameters used to improve the electrical performances of gate-recessed AlGaN/ GaN FinFET.

키워드

AlGaN/GaN; recessed gate; fin-type field-effect transistor (FinFET); 3-D TCAD; PEROXIDE OXIDATION TECHNIQUE; AL2O3/GAN MOSFET; CAP LAYER; HEMT; PERFORMANCE; SUBSTRATE; VOLTAGE
제목
Design and Analysis of Gate-recessed AlGaN/GaN Fin-type Field-Effect Transistor
저자
Jang, Young In; Seo, Jae Hwa; Yoon, Young Jun; Eun, Hye Rim; Kwon, Ra Hee; Lee, Jung-Hee; Kwon, Hyuck-In; Kang, In Man
DOI
10.5573/JSTS.2015.15.5.554
발행일
2015-10
유형
Article
저널명
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
권
15
호
5
페이지
554 ~ 562