Self-aligned electrostatic angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators

초록

We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly technique using in-plane electrothermal actuators. The AVC actuators are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etching steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0∼80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6×108 cycles, the measured optical scan angle variation and resonant frequency change were within 8 Hz and 1.1%, respectively.

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