Analysis of physical mechanisms for channel-length-dependent PBTS reliability in SA TG coplanar IGZO TFTs

초록

This study investigates the physical mechanisms for channel-length-dependent positive bias temperature stress (PBTS) reliability in self-aligned top-gate (SA TG) coplanar indium-gallium-zinc oxide (IGZO) thin-film transistors (TFTs). We fabricated devices with channel lengths of 3 µm, 12 µm, and 20 µm and characterized them using high-low frequency capacitance-voltage measurements and low-frequency noise analysis. Experimental results show that the 3 µm channel length device exhibits a significantly lower subgap density of states in the IGZO channel and a reduced near-interface trap density in the gate dielectric compared to its longer-channel counterparts. These reductions are strongly correlated with the enhanced PBTS reliability of the short-channel SA TG coplanar IGZO TFTs. We propose that hydrogen diffusion from the n+-IGZO source/drain extensions during fabrication may be the underlying mechanism, leading to defect passivation in both the IGZO channel and the SiO2 gate dielectric. These findings offer physical insights into the degradation behavior of IGZO TFTs and provide practical guidance for designing highly reliable backplane transistors for advanced active-matrix organic light-emitting diode displays. © 2025. The Author(s).

키워드