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Glass molding of nano grating structure using vitreous carbon nanostamp for photonic crystal optical filter
- Ju, J.;
- Kim, T.-H.;
- Kang, S.;
- Kim, S.-M.
Citations
SCOPUS
0초록
A method to fabricate vitreous carbon (VC) stamp was proposed for glass molding of micro/nano-scale components. A VC nanostamp having a nanograting cavity with a pitch of ~380 nm and a height of ~150 nm was fabricated by carbonization of nano replicated furan precursor having a nanograting structure with a pitch of 500 nm and height of 230 nm. A glass nanograting structure with a pitch of ~380 nm was fabricated by glass molding with the VC stamp. To examine the feasibility of the proposed method, the thermal stability of photonic crystal optical filters composed of glass moulded nanograting and physical vapor deposited TiO2 layer was evaluated.
키워드
Carbon; Carbonization; Crystal filters; Glass; Glassy carbon; Molding; Optical filters; Photonic crystals; Precision engineering; Thermodynamic stability; Furan precursors; Glass molding; Nano-grating structures; Nanograting; Physical vapor deposited; Vitreous carbon; Crystal structure
- 제목
- Glass molding of nano grating structure using vitreous carbon nanostamp for photonic crystal optical filter
- 저자
- Ju, J.; Kim, T.-H.; Kang, S.; Kim, S.-M.
- 발행일
- 2013
- 유형
- Conference Paper
- 저널명
- Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
- 권
- 2
- 페이지
- 356 ~ 359
- 언어
- ENG
- 출판사
- euspen
- 분량
- 4 페이지
- ISSN
- P 0000-0000