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Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode
- Paik, Hanjong;
- Hong, Jongin;
- Jeon, Young-Ah;
- Kim, Sung Kwan;
- Kim, Yunseok;
- 외 3명
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3초록
In this study, we report on the (100) cube-textured Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) thin films using a conducting perovskite CaRuO 3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (P r ) and coercive field (E c ) of 25 mu C/cm 2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.
키워드
conductive perovskite oxide; film orientation; fatigue improvement; Si substrate; CHEMICAL-VAPOR-DEPOSITION; SILICON
- 제목
- Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode
- 저자
- Paik, Hanjong; Hong, Jongin; Jeon, Young-Ah; Kim, Sung Kwan; Kim, Yunseok; Kim, Youngha; Kim, Yang Soo; No, Kwangsoo
- 발행일
- 2005
- 유형
- Article
- 권
- 75
- 페이지
- 115 ~ 121
- 언어
- ENG
- 출판사
- TAYLOR & FRANCIS LTD
- 발행국가
- 영국
- 분량
- 7 페이지
- ISSN
- E 1607-8489
P 1058-4587