Performance enhancement using vertex simplification based on linear parameter varying synthesis in planar stages

초록

Planar stages are dual-axis precise-motion systems comprising a housing with symmetrically mounted forcers and a levitation stage. Asymmetries in output forces, external disturbances, and uncertainties induce undesired yaw motion and instability. This paper proposes a nonlinear optimal control method based on linear parameter-varying (LPV) synthesis, which represents nonlinear dynamics as an equivalent LPV system. Vertex simplification minimizes the computational burden by reducing the number of vertices by half. A robust controller was designed for the LPV synthesis model. Real-time hardware-in-the-loop simulations (HILSs) confirmed the effectiveness of the proposed method, demonstrating its superior tracking accuracy and improved transient responses.

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