테이퍼 구조를 이용한 플라즈모닉 도파로의 광학 특성

초록

We have investigated the optical properties of plamonic waveguide with tapered structure basedon InP material for photonic integrated circuit(PIC). The proposed plasmonic waveguide is covered withthe Ag thin film to generate the plasmonic wave on metallic interface. The optical characteristics ofplasmonic waveguide were calculated using the three-dimensional finite-difference time-domain method. The plasmonic waveguide was fabricated with the lengths of 2 to 10 μm and the widths of 400 to 700nm, respectively. The plasmonic mode and optical loss were measured. The optimum plasmonic length is10 μm and widths are 600 and 700 nm in the fabricated waveguide. This plasmonic waveguide can bedirectly integrated with other conventional optical devices and can be essential building blocks of PIC.

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