PeakForce Quantitative Nanomechanical Imaging for Characterization of the Surface Energy of Nano-Patterned Au Strip

초록

Precise measurement of the surface energy of nanoscale metal thin films is crucial for the fabrication of reliable miniaturized electronic devices consisting of multi-stacked thin film strips. However, the conventional method utilizing sessile drops to measure the surface energy is not suitable for nanoscale samples owing to the much larger size of the liquid droplets than those of the samples being measured. Herein, nCA-AFM (nano contact angle-atomic force microscopy) based on PF-QNM (PeakForce quantitative nanomechanical mapping) imaging mode is explored as a novel tool to measure the surface energy of nanoscale Au strips. Au strips with thicknesses of 50 and 100 nm were patterned to have widths in a range from 200 to 500 nm. The surface energy of the nano-patterned Au strips measured with PF-QNM methods revealed that grain size is the most important factor determining the surface energy. The sample having different widths with the same grain size showed similar surface energy values, regardless of the sample dimensions. Our results highlight that grain size control is required to achieve the target surface energy of metal strips for applications in nanoscale electronic devices.

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