The growth of HVPE α-Ga2O3 crystals and its solar-blind UV photodetector applications

  • Lee, Moonsang; 
  • Yang, Mino; 
  • Lee, Hae-Yong; 
  • Lee, Hyun Uk; 
  • Lee, Hyunhwa; 
  • ... Son, Hyungbin; 
  • 외 1명
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초록

While Ga2O3 crystals are considered as the next generation optoelectronic materials, the exploration of HVPE α-Ga2O3 crystals and their use as solar-blind UV photodetector are still insufficient. In this paper, we investigated the structural characterization of HVPE α-Ga2O3 materials and their properties as solar-blind photodetector. HVPE α-Ga2O3 exhibited excellent structural properties with relatively good crystallinity, and smooth surface morphology, without any complicated process. Raman investigations confirmed the existence of slight compressive strain in the as-grown HVPE α-Ga2O3. UV–visible spectrophotometry proved that HVPE α-Ga2O3 had an optical bandgap of 5.15 eV, evidencing the suitability of this material for application as solar-blind photodetector. Furthermore, the photodetector synthesized using HVPE α-Ga2O3 showed excellent photo-response characteristics. We believe that this study will support further development of functional oxide semiconductor materials and opto-electronic devices. © 2020

키워드

Hetero-epitaxy; Hydride vapor epitaxy; Solar-blind photodetector; α-Ga2O3; Crystallinity; Crystals; Morphology; Oxide semiconductors; Photodetectors; Photons; Semiconductor devices; Surface morphology; Compressive strain; Opto-electronic materials; Photoresponses; Raman investigations; Solar-blind photodetectors; Structural characterization; UV photodetectors; Visible spectrophotometries; Gallium compounds
제목
The growth of HVPE α-Ga2O3 crystals and its solar-blind UV photodetector applications
저자
Lee, Moonsang; Yang, Mino; Lee, Hae-Yong; Lee, Hyun Uk; Lee, Hyunhwa; Son, Hyungbin; Kim, Un Jeong
DOI
10.1016/j.mssp.2020.105565
발행일
2021-03
유형
Article
저널명
Materials Science in Semiconductor Processing
권
123