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자료 필터
자료유형
발행연도
2005 ~ 2026
2005 2026
키워드
언어
전체 63건 중 61번부터 63번까지의 결과를 표시합니다.
2005
Article
Packaging method for RF MEMS devices using LTCC capping substrate and BCB adhesive bonding
- Kim, K.-I. ;
- Kim, J.-M. ;
- Kim, J.-M. ;
- Back, C.-W. ;
- Kim, Y.-K.
- 2005-06
- Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Article
Mechanically reliable MEMS variable capacitor using Single Crystalline Silicon (SCS) structure
- Kim, J.-M. ;
- Lee, S. ;
- Kim, J.-M. ;
- Baek, C.-W. ;
- Kwon, Y. ;
- 외 1명
- 2005-06
- Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Article
Mechanical characterization of gold thin films based on strip bending and nanoindentation test for MEMS/NEMS applications
- Baek, C.W. ;
- Kim, J.M. ;
- Kim, Y.K. ;
- Kim, J.H. ;
- Lee, H.J. ;
- 외 1명
- 2005
- Sensors and Materials
- MYU, SCIENTIFIC PUBLISHING DIVISION